KHIMIA-2014
INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH-PURITY MATERIALS, RUSSIAN ACADEMY OF SCIENCES
- Booth:
- 74B50
- Country:
- Russia
- Address:
- IPTM RAN, 6, Akademika Osip'yana Str., 142432, Chernogolovka, Moscow Region, Russia
- Phone:
- +7 (49652) 4-40-60
- Fax:
- +7 (49652) 4-42-25
- Web:
- http://www.iptm.ru
- E-mail:
- patent@iptm.ru
- Description:
- Fundamental research, methods and instrumentation for the structure formation and diagnostics in solid state micro-and nanoelectronics, X-ray optics, electron and X-ray lithography and microscopy.
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